#==================================================================================== # Copyright © 2003 Graham Petley # graham.petley@vlsitechnology.org # based on scmos.tech27, an original work distributed with the Magic distribution # # This technology file has been slimmed down in order to make it simpler and easier # to understand. Basically, only layers needed for digital standard cells are # supported (so no fancy analog or high voltage stuff). There is only one style # for extraction, cifin and cifout: the lambda=1um one. # The DRC section has the rules updated to vsclib ones (from the original scmos # rules), but it hasn't been extensively tested, so is likely to miss some of the # more obscure violations. # # Starting from scmos.tech27, make the following changes # 19-Oct-03 # 1/ Remove poly2 and associated transistor types and contact types (ec, el) # 2/ Remove via on flat surface rules 8.4 and 8.5 # 3/ Remove all styles from cifoutput section except 1.0(gen) and plot # 4/ Remove all styles from cifinput except 1.0(gen) # 5/ Remove all styles from extract except 1.0(scna20_orb) # 6/ Remove the two versatec plot styles # 7/ Remove MOSIS rules 11.*, 12.*, 13.*, 19.* # 8/ Remove capwell and MOSIS rules 17.* and 18.*, CWC CIF layer and cw references # 9/ Remove highvoltnwell, highvoltpwell and associated diffusions #10/ Remove capacitor #11/ Remove bipolar transistor references and MOSIS rules 16.* #12/ Remove CCD references and MOSIS rules #13/ Remove implant plane #14/ Remove enfet and epfet, nffet and pffet #15/ Add synonyms polyct, ndifct, pdifct, ntie, ntiect, ptie, ptiect #16/ Relabel styles to lambda=1um(vsclib) # 18-Dec-03 #17/ Added support for the abutment box layer, AB (GDS 63) #18/ Fixed problem with labels over contacts # #==================================================================================== tech scmos end version version 18-DEC-03 description "vsclib Technology file for Lambda=1um, 3LM" end planes abutment,ab well,w active,a metal1,m1 metal2,m2 metal3,m3 oxide,ox end types abutment ab,subcircuit well pwell,pw well nwell,nw active polysilicon,red,poly,p active ndiffusion,ndiff,green active pdiffusion,pdiff,brown metal1 metal1,m1,blue metal2 metal2,m2,purple metal3 metal3,m3,cyan active ntransistor,nfet active ptransistor,pfet active polycontact,pcontact,polycut,polyct,pc active ndcontact,ndiffcut,ndifct,ndc active pdcontact,pdiffcut,pdifct,pdc metal1 m2contact,m2cut,m2c,via,v metal2 m3contact,m3cut,m3c,via2,v2 active psubstratepcontact,ppcontact,ppc,pwcontact,ptiect,pwc,psc active nsubstratencontact,nncontact,nnc,nwcontact,ntiect,nwc,nsc active psubstratepdiff,ppdiff,pohmic,ptie,ppd,psd active nsubstratendiff,nndiff,nohmic,ntie,nnd,nsd active nplusdoping,ndoping,ndop active pplusdoping,pdoping,pdop metal1 genericcontact,gcontact,gc oxide substrateopen,subopen,open oxide pdiffusionstop,pdiffstop,pstop metal2 pad oxide glass end contact polyct poly metal1 ndifct ndiff metal1 pdifct pdiff metal1 ntiect ntie metal1 ptiect ptie metal1 m2c metal1 metal2 m3c metal2 metal3 end styles styletype mos ab 67 nwell 12 pwell 13 poly 1 ndiff 2 pdiff 4 ptie 5 ntie 3 ndop 2 ndop 38 pdop 4 pdop 38 nfet 6 nfet 7 pfet 8 pfet 9 metal1 20 metal2 21 metal3 22 gc 19 polyct 26 polyct 32 ndifct 2 ndifct 20 ndifct 32 pdifct 4 pdifct 20 pdifct 32 ptiect 5 ptiect 20 ptiect 32 ntiect 3 ntiect 20 ntiect 32 m2contact 20 m2contact 21 m2contact 33 m3contact 21 m3contact 22 m3contact 37 pad 20 pad 21 pad 33 pad 34 glass 34 open 2 open 20 pstop 8 error_p 42 error_s 42 error_ps 42 end compose compose nfet poly ndiff compose pfet poly pdiff paint pdifct pwell ndifct paint pfet pwell nfet paint pdiff pwell ndiff paint ntie pwell ptie paint ntiect pwell ptiect paint ndifct nwell pdifct paint nfet nwell pfet paint ndiff nwell pdiff paint ptie nwell ntie paint ptiect nwell ntiect paint gc m1 gc paint pad m1 pad paint pad m2 pad paint pad m3 pad paint pad m2c pad end connect nwell,ntiect,ntie nwell,ntiect,ntie pwell,ptiect,ptie pwell,ptiect,ptie pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m1,m2c/m1,gc pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m1,m2c/m1,gc m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad m3,m3c/m3 m3,m3c/m3 poly,polyct/a,nfet,pfet poly,polyct/a,nfet,pfet ndiff,ndifct/a,ndop ptie,ptiect/a,pdop,pstop pdiff,pdifct/a,pdop,pstop ntie,ntiect/a,ndop ndiff ndifct pdiff pdifct gc ndiff,ndifct/a,nfet,pdiff,pdifct/a,pfet,ntie,ntiect/a,ptie,ptiect/a,ntie,ntiect/a,ptie,ptiect/a,metal1 gc poly,polyct/a,nfet,pfet pad pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m1,m2c/m1,gc pad m2,m2c/m2,m3c/m2,pad pad m3,m3c/m3 end cifoutput style lambda=1um(vsclib) scalefactor 100 50 layer AB ab labels ab calma 63 1 layer CWN nwell calma 42 1 layer CWP pwell calma 41 1 layer CAA ndiff,ndifct/a,nfet,pdiff,pdifct/a,pfet,ntie,ntiect/a,ptie,ptiect/a labels ndiff,pdiff calma 43 1 layer CPG poly,polyct/a,nfet,pfet labels poly,nfet,pfet calma 46 1 layer CCC ndifct/m1,pdifct/m1 squares 200 calma 25 1 layer CCC ntiect/m1,ptiect/m1 squares 200 calma 25 1 layer CCC polyct/m1 squares 200 calma 25 1 layer CCC gc calma 25 1 layer CVA m2c/m1 squares 200 calma 50 1 layer CMF m1,pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m2c/m1 labels m1,pdifct,ndifct,ptiect,ntiect,polyct,m2c calma 49 1 layer CMS m2,m2c/m2,m3c/m2 labels m2,m2c,m3c calma 51 1 templayer XTN ntie,ntiect/a grow 100 templayer XTP ptie,ptiect/a grow 100 layer CSN pwell and AB grow 100 and-not XTP and-not CWN calma 45 1 layer CSN ntie,ntiect/a grow 100 calma 45 1 layer CSP nwell and AB grow 100 and-not XTN and-not CWP calma 44 1 layer CSP ptie,ptiect/a grow 100 calma 44 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 style plot scalefactor 100 50 layer CM2 m2,m2c/m2,pad/m2 labels m2 layer CMF m1,pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m2c/m1 labels m1,pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m2c/m1 layer CPG poly,polyct/a,nfet,pfet labels poly,nfet,pfet layer CND ndiff,ndifct,nfet,ptiect,ptie labels ndiff layer CPD pdiff,pdifct,pfet,ntiect,ntie labels pdiff layer CVA m2c squares 200 layer CCC ndifct,pdifct,polyct,ptiect,ntiect squares 200 layer AB ab layer CNW nwell layer CPW pwell end cifinput style lambda=1um(vsclib) scalefactor 100 layer ab AB labels AB layer nwell CWN labels CWN layer pwell CWP labels CWP layer poly CPG labels CPG layer pdiff CSP and CAA and CWN layer ndiff CWP and CAA and CSN layer ntie CWN and CSN and CAA layer ptie CWP and CSP and CAA layer nfet CPG and CAA and CSN layer pfet CAA and CPG and CSP layer ndifct CCC grow 100 and CMF grow 100 and CWP and CAA and CSN shrink 100 calma CCC 25 * layer pdifct CCC grow 100 and CMF grow 100 and CWN and CAA and CSP shrink 100 calma CCC 25 * layer ntiect CCC grow 100 and CMF grow 100 and CWN and CAA and CSN shrink 100 calma CCC 25 * layer ptiect CCC grow 100 and CMF grow 100 and CWP and CAA and CSP shrink 100 calma CCC 25 * layer polyct CCC grow 100 and CMF grow 100 and CPG shrink 100 calma CCC 25 * layer m1 CMF grow 100 shrink 100 labels CMF layer m2c CVA grow 100 and CMS and CMF labels CMS calma CVA 50 * layer m3c CVS grow 100 and CMT and CMS labels CMT calma CVS 61 * layer glass COG layer pad CMF shrink 100 and CMS shrink 500 and CVA shrink 100 and XP and COG grow 600 layer m2 CMS labels CMS layer m3 CMT and-not XP labels CMT calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CVS 61 * calma CMT 62 * calma AB 63 * end mzrouter style irouter layer m2 32 64 256 1 layer m1 64 32 256 1 layer poly 128 128 512 1 contact m2contact metal1 metal2 1024 contact polyct metal1 poly 2056 notactive poly polyct style garouter layer m2 32 64 256 1 layer m1 64 32 256 1 contact m2contact metal1 metal2 1024 end drc edge4way (~nwell)/w nwell 20 nwell nwell 20 "1.1 NWELL Width < 20" edge4way (~pwell)/w pwell 20 pwell pwell 20 "1.1 PWELL Width < 20" edge4way nwell (~nwell)/w 9 (~nwell)/w (~nwell)/w 20 "1.2 NWELL Space < 20" edge4way pwell (~pwell)/w 9 (~pwell)/w (~pwell)/w 20 "1.2 PWELL Space < 20" width ndiff,ndifct/a,nfet 4 "2.1 NDIF Width < 4" width pdiff,pdifct/a,pfet 4 "2.1 PDIF Width < 4" width ntie,ntiect/a 4 "2.1 NTIE Width < 4" width ptie,ptiect/a 4 "2.1 PTIE Width < 4" spacing ndiff,ndifct/a,nfet ndiff,ndifct/a,nfet 4 touching_ok "2.2 NDIF Space < 4" spacing pdiff,pdifct/a,pfet pdiff,pdifct/a,pfet 4 touching_ok "2.2 PDIF Space < 4" spacing ntie,ntiect/a ntie,ntiect/a 4 touching_ok "2.2 NTIE Space < 4" spacing ptie,ptiect/a ptie,ptiect/a 4 touching_ok "2.2 PTIE Space < 4" spacing ndiff,ndifct/a pdiff,pdifct/a 12 touching_illegal "2.3 NDIF to PDIF Space < 12 (=rule 2.3+rule 2.3)" spacing ndiff,ndifct/a ntie,ntiect/a 12 touching_illegal "2.4 NDIF to NTIE Space < 12 (=rule 2.3+rule 2.4)" spacing pdiff,pdifct/a ptie,ptiect/a 12 touching_illegal "2.4 PDIF to PTIE Space < 12 (=rule 2.3+rule 2.4)" spacing ntie,ntiect/a ptie,ptiect/a 12 touching_illegal "2.4 NTIE to PTIE Space < 12 (=rule 2.4+rule 2.4)" spacing ndiff,ndifct/a,nfet nwell 6 touching_illegal "2.3 NDIF to NWELL Space < 6" spacing pdiff,pdifct/a,pfet pwell 6 touching_illegal "2.3 PDIF to PWELL Space < 6" spacing ntie,ntiect/a pwell 6 touching_illegal "2.4 NTIE to PWELL Space < 6" spacing ptie,ptiect/a nwell 6 touching_illegal "2.4 PTIE to NWELL Space < 6" spacing ndiff,ndifct/a,nfet ptie,ptiect/a 4 touching_illegal "2.5 NDIF to PTIE Space < 4" spacing pdiff,pdifct/a,pfet ntie,ntiect/a 4 touching_illegal "2.5 PDIF to NTIE Space < 4" width poly,polyct/a,nfet,pfet 2 "3.1 POLY Width < 2" spacing poly,polyct/a poly,polyct/a 4 touching_ok "3.2 POLY Space < 4" spacing nfet nfet 5 touching_ok "3.2a CHANNEL Space < 5" spacing pfet pfet 5 touching_ok "3.2a CHANNEL Space < 5" edge4way nfet,pfet poly,polyct/a 4 poly,polyct/a 0 0 "3.3 POLY overlap of transistor < 4 (endcap rule)" edge4way nfet ndiff,ndifct/a 5 ndiff,ndifct/a,nfet ndiff,ndifct/a 5 "3.4 NDIF overlap of transistor < 4 (s/d width rule)" edge4way pfet pdiff,pdifct/a 5 pdiff,pdifct/a,pfet ndiff,ndifct/a 5 "3.4 PDIF overlap of transistor < 4 (s/d width rule)" edge4way nfet space 1 poly 0 0 "3.4 NDIF overlap of transistor = 0 (s/d width rule)" edge4way pfet space 1 poly 0 0 "3.4 PDIF overlap of transistor = 0 (s/d width rule)" edge4way ndiff,ndifct/a poly,polyct 2 space 0 2 "3.5 NDIF to POLY Space < 2" edge4way pdiff,pdifct/a poly,polyct 2 space 0 2 "3.5 PDIF to POLY Space < 2 first" edge4way ntie,ntiect/a poly,polyct 2 space 0 2 "3.5 NTIE to POLY Space < 2" edge4way ptie,ptiect/a poly,polyct 2 space 0 2 "3.5 PTIE to POLY Space < 2" spacing pfet ntie,ntiect/a 6 touching_illegal "4.2 NTIE to P-Transistor Space < 6" spacing nfet ptie,ptiect/a 6 touching_illegal "4.2 PTIE to N-Transistor Space < 6" edge4way ptie,ptiect/a ~(ndiff,ndifct,ptiect,ptie)/a 4 ~(nfet)/a ~(ndiff,ndifct,ptiect,ptie)/a 4 "Transistors must be separated from selects(generated by well cont) by 4 (MOSIS rule #4.1.e)" edge4way ntie,ntiect/a ~(pdiff,pdifct,ntiect,ntie)/act 4 ~(pfet)/act ~(pdiff,pdifct,ntiect,ntie)/act 4 "Transistors must be separated from selects(generated by well cont) by 4 (MOSIS rule #4.1.f)" edge4way ~(pdiff,pdifct/a,pfet)/act pdiff,pdifct,pfet 4 ~(ntie,ntiect/a)/act pdiff,pdifct/a,pfet 2 "Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.a)" edge4way ~(ndiff,ndifct/a,nfet)/act ndiff,ndifct,nfet 4 ~(ptie,ptiect/a)/act ndiff,ndifct/a,nfet 2 "Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.b)" width polyct 4 "Poly contact width must be at least 4 (MOSIS rule #5B.1,2,3)" edge4way poly,polyct/a,nfet,pfet ~(poly,polyct/a,nfet,pfet)/a 3 ~polyct/a ~(poly,polyct/a,nfet,pfet)/a 3 "Poly contact must be at least 3 from other poly (MOSIS rule #5B.4,5)" spacing polyct ndiff,ndifct/a,nfet,pdiff,pdifct/a,pfet,ntie,ntiect/a,ptie,ptiect/a 1 touching_illegal "Poly contact must be 1 unit from diffusion (MOSIS rule #5B.6)" width ndifct,pdifct 4 "Diffusion contact width must be at least 4 (MOSIS rule #6B.1,2,3)" width ntiect,ptiect 4 "Substrate contact width must be at least 4 (MOSIS rule #6B.1,2,3)" edge4way ndiff,ndifct/a,nfet,pdiff,pdifct/a,pfet,ntie,ntiect/a,ptie,ptiect/a ~(ndiff,ndifct/a,nfet,pdiff,pdifct/a,pfet,ntie,ntiect/a,ptie,ptiect/a)/act 4 ~(ndifct,pdifct,ntiect,ptiect)/act ~(ndiff,ndifct/a,nfet,pdiff,pdifct/a,pfet,ntie,ntiect/a,ptie,ptiect/a)/act 4 "Diffusion contacts must be 4 from other diffusions (MOSIS rule #6B.4,5)" spacing pdifct pfet 2 touching_illegal "6.4 CONTACT to P-Transistor Space < 3" spacing ndifct nfet 2 touching_illegal "6.4 CONTACT to N-Transistor Space < 3" spacing ndifct polyct/a 4 touching_illegal "3.5 NDIF to POLY Space < 2" spacing pdifct polyct/a 4 touching_illegal "3.5 PDIF to POLY Space < 2" spacing ntiect polyct/a 4 touching_illegal "3.5 NTIE to POLY Space < 2" spacing ptiect polyct/a 4 touching_illegal "3.5 PTIE to POLY Space < 2" edge4way m3c/m3 ~m3c/m3 1 ~m3c/m3 (~m3c,m3c)/m3 1 "Metal3 contacts must be rectangular (Magic rules)" edge4way m2c/m2 ~m2c/m2 1 ~m2c/m2 (~m2c,m2c)/m2 1 "Metal2 contacts must be rectangular (Magic rules)" edge4way ndifct/m1 ~ndifct/m1 1 ~ndifct/m1 (~ndifct,ndifct)/m1 1 "N-diffusion contacts must be rectangular (Magic rules)" edge4way pdifct/m1 ~pdifct/m1 1 ~pdifct/m1 (~pdifct,pdifct)/m1 1 "P-diffusion contacts must be rectangular (Magic rules)" edge4way ptiect/m1 ~ptiect/m1 1 ~ptiect/m1 (~ptiect,ptiect)/m1 1 "P-substrate contacts must be rectangular (Magic rules)" edge4way ntiect/m1 ~ntiect/m1 1 ~ntiect/m1 (~ntiect,ntiect)/m1 1 "N-substrate contacts must be rectangular (Magic rules)" edge4way polyct/m1 ~polyct/m1 1 ~polyct/m1 (~polyct,polyct)/m1 1 "Polysilicon contacts must be rectangular (Magic rules)" width pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m1,m2c/m1,gc,pad/m1 4 "7.1 METAL1 Width < 4" spacing pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m1,m2c/m1,gc,pad/m1 pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m1,m2c/m1,gc,pad/m1 4 touching_ok "7.2 METAL1 Space < 4" width m2c 4 "9.3 METAL2 overlap of VIA < 1" width m2,m2c/m2,m3c/m2,pad 4 "9.1 METAL2 Width < 4" spacing m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad 4 touching_ok "9.2 METAL2 Space < 4" width m3c 4 "Third-level metal contact width must be at least 4 (MOSIS rule #14.1,2,3)" width m3,m3c/m3 4 "Third-level metal width must be at least 6 (MOSIS rule #15.1a)" spacing m3,m3c/m3 m3,m3c/m3 4 touching_ok "Third-level metal spacing must be at least 4 from other third-level metal (MOSIS rule #15.2a)" edge4way m3c/m3 ~m3c/m3 1 m3 m3 1 "Mimimum metal3 overlap of via must be at least 1 (MOSIS rule #15.3)" exact_overlap m3c,m2c,ndifct,pdifct,polyct,ptiect,ntiect no_overlap pfet,nfet pfet,nfet end extract style lambda=1um(vsclib) cscale 1 lambda 100 step 100 sidehalo 800 planeorder abutment 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 resist (ndiff,ntie,ndifct,ntiect)/a 26670 resist (pdiff,ptie,pdifct,ptiect)/a 59550 resist (poly,polyct,pfet,nfet)/a 23860 resist (metal1,m2c/m1) 49 resist (metal2,via/m2) 26 resist (nwell)/well 2505830 contact ndifct 4 18710 contact pdifct 4 18710 contact polyct 4 11000 contact m2c 4 30 # areacap (ndiff,ntie,ndifct,ntiect)/a 0 # perimc (ndiff,ntie,ndifct,ntiect)/a space,pwell 0 # areacap (pdiff,ptie,pdifct,ptiect)/a 0 # perimc (pdiff,ptie,pdifct,ptiect)/a space,nwell 0 areacap (poly,polyct)/a 39 overlap (poly,polyct)/a nwell,pwell 39 perimc (poly,polyct)/a ~(poly,polyct)/a 80 sideoverlap (poly,polyct)/a ~(poly,polyct)/a nwell,pwell 80 areacap (m1,ndifct,pdifct,ntiect,ptiect,polyct,via)/m1 47 overlap (m1,ndifct,pdifct,ntiect,ptiect,polyct,via)/m1 nwell,pwell 47 (poly,polyct)/a,(ndiff,pdiff,ppd,nnd,ndifct,pdifct,ntiect,ptiect)/a overlap (m1,ndifct,pdifct,ntiect,ptiect,polyct,via)/m1 (ndiff,pdiff,ppd,nnd,ndifct,pdifct,ntiect,ptiect)/a 47 overlap (m1,ndifct,pdifct,ntiect,ptiect,polyct,via)/m1 (poly,polyct)/a 30 areacap (m2,m2c,m3c,pad)/m2 19 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 19 (poly,polyct)/a,(m1,ndifct,pdifct,ntiect,ptiect,polyct,via)/m1,(ndiff,pdiff,ppd,nnd,ndifct,pdifct,ntiect,ptiect)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,ppd,nnd,ndifct,pdifct,ntiect,ptiect)/a 22 (m1,ndifct,pdifct,ntiect,ptiect,polyct,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,polyct)/a 19 (m1,ndifct,pdifct,ntiect,ptiect,polyct,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndifct,pdifct,ntiect,ptiect,polyct,via)/m1 45 fet pfet pdiff,pdifct 2 pfet vdd! nwell 204 450 fet nfet ndiff,ndifct 2 nfet vss! pwell 150 450 fetresis nfet linear 14100 fetresis pfet linear 48100 fetresis nfet saturation 14100 fetresis pfet saturation 48100 end wiring contact pdifct 4 metal1 0 pdiff 1 contact ndifct 4 metal1 0 ndiff 1 contact polyct 4 metal1 0 poly 1 contact m2c 4 metal1 0 metal2 0 contact m3c 4 metal2 0 metal3 0 end router layer1 metal1 4 pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m1,m2c/m1,gc 4 layer2 metal2 4 m2,m2c/m2,m3c/m2 4 contacts m2contact 4 gridspacing 8 end plowing fixed nfet,pfet,glass,pad covered nfet,pfet drag nfet,pfet end plot style gremlin pfet 9 nfet 10 m2c 11 pwell 15 nwell 16 poly,polyct/a,nfet,pfet 19 pdifct/m1,ndifct/m1,ptiect/m1,ntiect/m1,polyct/m1,m1,m2c/m1,gc 22 pad,glass 23 ntie,ntiect 24 m2,m2c/m2,m3c/m2,pad 28 pdiff,pdifct,pfet 29 ptie,ptiect 30 ndiff,nfet,ndifct 31 m2c/m1,polyct/m1,ndifct/m1,pdifct/m1,ptiect/m1,ntiect/m1,pad/m1 X style postscript 1 C0C0C0C0 C0C0C0C0 00000000 00000000 0C0C0C0C 0C0C0C0C 00000000 00000000 2 A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A 3 00030003 000C000C 00300030 00C000C0 03000300 0C000C00 30003000 C000C000 4 00000000 00000000 C0C0C0C0 00000000 00000000 00000000 0C0C0C0C 00000000 5 FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF 6 07070707 0E0E0E0E 1C1C1C1C 38383838 70707070 E0E0E0E0 C1C1C1C1 83838383 7 18181818 30303030 60606060 C0C0C0C0 81818181 03030303 06060606 0C0C0C0C 8 18181818 0C0C0C0C 06060606 03030303 81818181 C0C0C0C0 60606060 30303030 9 18181818 3C3C3C3C 3C3C3C3C 18181818 81818181 C3C3C3C3 C3C3C3C3 81818181 10 F0F0F0F0 60606060 06060606 0F0F0F0F 0F0F0F0F 06060606 60606060 F0F0F0F0 11 01000080 02000040 0C000030 F000000F 000FF000 00300C00 00400200 00800100 12 00000000 00000000 00000000 00000000 00000000 00000000 00000000 00000000 13 00000000 00000000 33333333 33333333 00000000 00000000 CCCCCCCC CCCCCCCC 1 47 95 111 0 2 223 31 223 0 3 0 0 0 192 4 31 111 31 0 5 31 111 255 0 6 63 95 191 0 7 255 63 255 0 8 0 0 0 127 9 223 47 223 0 10 0 255 255 0 11 0 0 255 0 12 191 127 0 0 13 95 223 63 0 14 0 0 0 255 15 191 127 63 0 16 111 151 244 0 17 23 175 183 0 polyct,ndifct,pdifct,ptiect,ntiect 14 X m2c,pad,glass 14 B pad,glass 14 11 m2c 14 13 m2,m2c,pad 13 10 pdifct,ndifct,ptiect,ntiect,polyct,m1,m2c,gc 12 9 ntie,ntiect 7 1 ptie,ptiect 6 1 nfet 9 8 pfet 1 7 poly,polyct 10 5 nfet 16 5 pfet 17 5 pdiff,pdifct 1 5 ndiff,ndifct 9 5 pwell 1 4 nwell 2 4 style pnm draw metal1 draw metal2 draw polysilicon draw ndiffusion draw pdiffusion draw ntransistor draw ptransistor map psubstratepdiff pdiffusion map nsubstratendiff ndiffusion map polycontact polysilicon metal1 map m2contact metal1 metal2 map m3contact metal2 metal3 map ndifct ndiffusion metal1 map pdifct pdiffusion metal1 map nsubstratencontact ndiffusion metal1 map psubstratepcontact pdiffusion metal1 end